Geun Young Yeom
Professor

School of Advanced Materials Science and Engineering, Sungkyunkwan University

E-mail : gyyeom@skku.edu

Education

(1977-1981) Hanyang University: B.S. in Metallurgical Engineering

(1981-1983) Seoul National University: M.S. in Materials Engineer

(1984-1989) University of Illinois at Urbana-Champaign, USA: Ph.D. in Electronic Materials Engineering

Career

(1984-1989) Research Assistant, University of Illinois at Urbana-Champaign

(1989-1991) Process Engineer, Institute of Semiconductors in Tektronix Inc. USA

(1991-1992) Senior Engineer, Institute of Semiconductors in TDK Corporation (SSI Inc.), USA

(1992-Present) Professor, School of Advanced Materials Science and Engineering, SKKU

Research Interests

1. Plasma Processing

- Etch Technology (Atomic Layer Etching, Neutral Beam Etching, Ion Beam Etching, Pulsed Plasma Etching)

- Dry Cleaning Technology (Radical Cleaning)

- Deposition Technology (PEALD, VHF-PEALD, ICP-assisted Sputtering)

- Liquid HFC Etching

2. Two-dimensional (2D) Material Applications (Graphene, MoS2, Black Phosphorus, etc.)

Selected Publications

1. "Fabrication of high-performance graphene nanoplatelet-based transparent electrodes via self-interlayer-exfoliation control"
   Nanoscale, 10, 2351 (2018)
2. "Atomic Layer Etching Mechanism of MoS2 for Nanodevices"
   ACS Appl. Mater. Interfaces, 9, 11967−11976 (2017)
3. "Atomic layer etching of graphene through controlled ion beam for graphene-based electronics"
   Scientific Reports, 7, 2462 (2017)
4. "Chlorine-trapped CVD bilayer graphene for resistive pressure sensor with high detection limit and high sensitivity"
   2D Materials, 4, 025049 (2017)