%PDF-1.4
%
2 0 obj
<>
endobj
10 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
5 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
8 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
1 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
4 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
3 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
9 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
7 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
6 0 obj
<>>>/Subtype/Form/BBox[0 0 809.97 612]/Matrix [1 0 0 1 0 0]/Length 190/FormType 1/Filter/FlateDecode>>stream
x]AK0sTXj[k<)^
ifMJw{a`gt
f݀ -QoyR7c(~"ʲ?z'/xKAQAd6UU\a5fTR:OiϷ0k:DxvPQwƴnQ&jDA
endstream
endobj
11 0 obj
<>stream
iText 2.1.7 by 1T3XT
2016-01-05T04:58:23ZArbortext Advanced Print Publisher 9.0.114/W2015-08-25T18:57:23+05:30
aip.orgtrue10.1116/1.49294662015-08-26Etch characteristics of magnetic tunnel junction materials using substrate heating in the pulse-biased inductively coupled plasma
10.1116/1.4929466http://dx.doi.org/10.1116/1.4929466
doi:10.1116/1.4929466Etch characteristics of magnetic tunnel junction materials using substrate heating in the pulse-biased inductively coupled plasmaMin Hwan JeonKyung Chae YangSehan LeeGeun Young Yeom
2015-08-26trueaip.org10.1116/1.4929466
endstream
endobj
12 0 obj
<>stream
x+ |
endstream
endobj
13 0 obj
<>stream
xS**T0T0 Bi yA$
endstream
endobj
14 0 obj
<>stream
x+ |
endstream
endobj
15 0 obj
<>stream
xS**T0T0 Bi y\'
endstream
endobj
16 0 obj
<>stream
x+ |
endstream
endobj
17 0 obj
<>stream
xS**T0T0 Bi ye(
endstream
endobj
18 0 obj
<>stream
x+ |
endstream
endobj
19 0 obj
<>stream
xS**T0T0 Bi yS&
endstream
endobj
20 0 obj
<>stream
x+ |
endstream
endobj
21 0 obj
<>stream
xS**T0T0 Bi y+
endstream
endobj
22 0 obj
<>stream
x+ |
endstream
endobj
23 0 obj
<>stream
xS**T0T0 Bi yw*
endstream
endobj
24 0 obj
<>stream
x+ |
endstream
endobj
25 0 obj
<>stream
xS**T0T0 Bi yJ%
endstream
endobj
26 0 obj
<>stream
x+ |
endstream
endobj
27 0 obj
<>stream
xS**T0T0 Bi y8#
endstream
endobj
28 0 obj
<>stream
x+ |
endstream
endobj
29 0 obj
<>stream
xS**T0T0 Bi yn)
endstream
endobj
30 0 obj
<>/Font<>>>/MediaBox[0 0 612 809.97]/Annots[38 0 R 39 0 R 40 0 R 41 0 R 42 0 R 43 0 R 44 0 R 45 0 R 46 0 R 47 0 R 48 0 R 49 0 R 50 0 R 51 0 R 52 0 R 53 0 R 54 0 R 55 0 R 56 0 R]>>
endobj
32 0 obj
<>stream
xWYoF^@oC#e;Q2%YR$Zbk]ԑ-E5
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